賀終身成就獎得主林本堅院士榮獲SPIE2023年度墨子獎
2023-02-01
The SPIE Society Awards:Honoring transformative advancements in a variety of professional areas — including medicine, astronomy, lithography, optical metrology, optical design, and community leadership — the Society's awards recognize technical accomplishments as well as committed service to SPIE and support of its organizational mission. This year's 21 award recipients represent an exciting range of stellar achievements across light-based sciences and technologies. Meet the 2023 SPIE Society Award recipients.Burn Lin: The 2023 SPIE Mozi AwardThe SPIE Mozi Award recognizes outstanding discoveries, inventions, or scientific and technical achievements in the field of opticsSPIE墨子獎:Burn J. Lin (在半導體製造的浸沒式微影技術方面取得重大的科學成就)